Web3. Improved efficiency contact hole patterning Contact hole patterning is expected to be one of the first high volume applications for EUV lithography and is a significant driver in shot noise requirements. The fact that conventional contact hole patterning typically requires at least 2× the dose compared to line-space patterning further ... WebJan 24, 2024 · Contact/hole patterns described in Section 6 had via sizes below 30nm. Hardware and process optimizations designed to improve defectivity and CDU, including new dispense systems, rinse and …
Potential applications of negative tone development in …
WebMay 30, 2014 · This study investigates the potential of DSA for contact hole shrink patterning using poly(styrene-block-methyl methacrylate) (PS-b-PMMA) di-block … WebApr 26, 2024 · In anticipation of the first High-NA EUV prototyping system, we are pushing the resolution capability of current 0.33NA EUV patterning technologies to predict the performance of thinner resists for printing fine line/spaces and contact holes. In addition to pattern collapse, imec identifies line-edge roughness (LER) as one of the most critical ... finnish education
Advanced Patterning Techniques for 3D NAND Devices
WebAug 1, 2011 · The results for contact hole patterning show that only NTD is able to reach tight CD target down to 30 nm, although PTD shows larger depth-of-focus (DoF) over the NTD process at CD targets of 37 nm. Further optimization with process and materials could be required to improve defectivity as well as the potential introduction of new resolution ... WebIn this paper, we will analysis the defect fail model and introduce the experimental results of hole-type defect forming process for contact hole patterning. We also presented data show the optimized setting of SOC coater parameters can suppress the defect level by >90% comparing to the original standard recipe, such as dispense condition, DIW ... WebMar 29, 2013 · Finally, the hole patterns created through the various contact hole applications were transferred to substrates of interest with the goal of incorporating … esp bucket teeth